Dual displacement resolution encoder by integrating single holographic grating sensor and heterodyne interferometry
نویسندگان
چکیده
منابع مشابه
Precision displacement measurement by active laser heterodyne interferometry.
We demonstrate an active laser heterodyne interferometer which can automatically compensate environmental disturbances and is capable of precision displacement measurement. Two Zeeman He-Ne lasers were employed. Laser II was used as the light source to stabilize the interferometer by using a piezomirror in a feedback loop. The hetereodyne signal of the two lasers was used to directly calibrate ...
متن کاملSingle beam grating coupled interferometry: high resolution miniaturized label-free sensor for plate based parallel screening.
Grating Coupled Interferometry (GCI) using high quality waveguides with two incoupling and one outcoupling grating areas is introduced to increase and precisely control the sensing length of the device; and to make the sensor design suitable for plate-based multiplexing. In contrast to other interferometric arrangements, the sensor chips are interrogated with a single expanded laser beam illumi...
متن کاملTwo-wavelength double heterodyne interferometry using a matched grating technique.
Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces. A two-wavelength He-Ne laser and a matched grating technique are used to improve system stability and to simplify heterodyne frequency generation.
متن کاملA Comparison of Electronic Heterodyne Moire Deflectometry and Electroni,; Heterodyne Holographic Interferometry for Flow Measurements
Electronic heterodyne moire deflectometry and electronic heterodyne holographic interferometry are compared as methods for the accurate measurement of refractive index and density change distributions of phase object p . Experimental results are presented to show that the two methods have comparable accuracy for measuring the first derivative of the intE-ferometric fringe shift. The phase objec...
متن کاملPicometer level displacement metrology with digitally enhanced heterodyne interferometry.
Digitally enhanced heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier. We present the first characterization of the technique's displacement sensitivity. The displacement of an optical cavity was measured using digitally enhanced heterodyne interferometry and compared to a simultaneous readout based on conventional Poun...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2017
ISSN: 1094-4087
DOI: 10.1364/oe.25.030189